• Introduction to Microfabrication and MEMS
  • Lecture Schedule:
    • Tue/Thu, 4pm – 5:30pm

Announcements

  • 8/8: Welcome to ECE 197U!
  • 8/9: You will need to be logged in to your EEE account to access the files.
  • 8/10: Read through this speech by Richard Feynman in 1959 at Caltech that explores the possibilities of miniaturization. He also gave a sequel to this speech in 1983 at the Jet Propulsion Lab.
  • 8/10: Read about the first MEMS device here.
  • 9/18: List of submitted papers for HW#3 here. This list will be updated every time a submission is received.
  • 9/19: Sample mask design discussed in class here.
  • 10/24: Someone in the class pointed out a typo in HW #5. The polysilicon’s conductivity should be 10^5 S/m. The corrected HW#5 is here. Kindly redo your homework to reflect this correction and submit on or before 5pm on Monday, Oct 30. Apologies for the mistake.
  • 12/5: We will have the final report presentations on December 12, 2017, 9:00-11:30am. Venue TBA. Please refer to this rubric that will be used for grading your presentations.

Assignments

  • HW#1 here. Due on Aug 22 Aug 24, before the start of class. (solution)
  • For HW#2, you should have identified at least 3 structural layers and 3 sacrificial layers.
  • HW#3 here. First submission due on Sept 19, 5pm. Changes can be submitted until Sept 22, 5pm. Second submission due on Sept 29, 5pm.
  • HW #4 here. Due on Oct 24, before the start of class. (solution)
  • HW #5 here. Due on Oct 24, before the start of class. (solution)

Class Materials

  • Syllabus
  • Lecture 1: Introduction (pdf)
  • Lecture 2: Microfabrication for MEMS I (Micromachining, pdf)
  • Lecture 3: Microfabrication for MEMS II (Photolithography, pdf)
  • Lecture 4: Microfabrication for MEMS III (Deposition, pdf)
  • Lecture 5: Microfabrication for MEMS IV (Etching, pdf)
  • Lecture 6: MUMPS (pdf)
  • Lecture 7: Material Properties in MEMS (pdf)
  • Lecture 8: Elasticity in MEMS (pdf)
  • Lecture 9: Beam/Plate Bending in MEMS (pdf)
  • Lecture 10: Residual Stress and Energy Methods (pdf)
  • Lecture 11: Thermal Energy Domain I (pdf)
  • Lecture 12: Thermal Energy Domain II (pdf)
  • Lecture 13: Fluids (pdf)